Semicoclean products are used for cleaning semiconductors and LCD substrates. Cleaning semiconductors and LCD substrates requires time and expense, however, Semicoclean products are practical, saving time and cost.
Properties of the product
1.Processing of used liquid is easy. (No need for a liquid-waste treatment tank)
2.Strong degreasing effect. (No sodium content)
3.It is as effective in dissolbing heavy metals as nitric acid and hydrogen peroxide
4.It will slightly etch silicon and silicon oxide
5.Semiconductors surfaces treated by Semicoclean 23 strongly are hydrophobic and easy to clean
6.Combined degreasing action and metal ion removal allow whole processes to be done at once
7.It has a superior cleaning effect after polishing
Products Specification
Component
Tetra Methyl Ammonium Hydroxide solution
Physical Properties
Specific gravity approx. 1, pH13. Colorless clear liquid.
Boiling point : 80-150°C. Odorless at room temperature.
Impurity
Lead(Pb) 0.007ppm, Copper(Cu) 0.007ppm, Iron(Fe) 0.002ppm, Zine(Zn) 0.004ppm, Nickel(Ni) 0.007ppm, Arsenic(As) 0.0004 ppm
Classification
Poisonous and Deleterious Substances Control Act
Use Limitations
More than 100. 2" sillicon wafers can be clearned with 1kg .
Replace it with new solution when the pH is aroud 10-11, depending on the degree of stain (or contamination, discoloration.)
Change with Time
No change occurs with time, but store it in a cool dark place whenever possible.
Waste-Liquid Disposal
The solution contains a poisonous deleterious substance,Tetra Ammonium Hydroxide. Undiluted solution should be adjusted to the pH level of a specially-controlled industrial waste (Alkaline waste). It needs to be de-toxified, stabilized and neutralized to lower its hazardous toxicity.
Residural waste: Dispose according to local disposal law. Consign the waste-liquid to a vendor approved by the local authorities for disposal.
Containers; Place warnings concerning the residual substance on the container, dispose of it according to the local disposal law. Consign the container to a vendor approved by the local authorities for disposal.
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