Spin Coaters
Industry-leading precision
With spin speed resolutions and repeatability within 0.2 rpm, Brewer Science® Cee® spin coaters provide all the necessary precision for critical processes.
Broad chemical compatibility
Choose between Teflon®, stainless steel, or polyethylene spin bowl construction for maximum material compatibility.
Exceptional uptime and reliability
All Brewer Science® Cee® spin coaters feature an indirect drive system, which protects the spin motor from contact with process chemicals and solvents. Isolating the spin motor from the process environment greatly increases tool reliability and uptime.
Product Options
With numerous configuration options and a huge variety of substrate-specific spin chucks to choose from, Brewer Science® Cee® spin coaters can handle almost any application imaginable. Compare product specifications below to see which configuration is right for you, or contact us to request more information.
Cee® 200X
Cee® 300X
Substrate Sizes
Up to 200 mm round or 7″ × 7″ square
Up to 450 mm round or 14″ × 14″ square
PRECISION
Maximum Spin Speed
12,000 rpm
6,000 rpm
4,000 rpm and 3,000 rpm configurations available for additional acceleration capabilities
Spin Speed Resolution
Within 0.2 rpm
Within 0.2 rpm
Spin Speed Repeatability
Within 0.2 rpm
Within 0.2 rpm
Spin Speed Acceleration
Up to 23,000 rpm/s with 200-mm substrate
Up to 23,000 rpm/s with 300-mm substrate
Up to 3,000 rpm/s with 350 mm × 6 mm round recessed chuck
Up to 30,000 rpm/s unloaded
Up to 400 rpm/s with 14″ × 14″ × 11 mm photomask recessed chuck
Up to 30,000 rpm/s unloaded
CONTROL
Control Interface
Onboard Windows®-based PC with 7″ touch screen display
Connectivity
USB and ethernet ports for uploading/downloading process parameters
Third-Party Integration
System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps
Automated Dispense Control
Simultaneously trigger up to 16 automated dispense nozzles
Simultaneously trigger up to 16 automated dispense nozzles
Dispense or Component Outputs
16
16
Spin Control
Bidirectional speed control (oscillating chuck)
In-process dynamic speed/acceleration control
PROGRAMMABILITY
Onboard Storage
Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe
Step Time
0.1 to 9,999.9 seconds with a resolution of 0.1 second
Security
Password protection available at no charge
DESIGN
Spin Bowl Design
Polyethylene spin bowl for optimal material compatibility
Integrated bowl ring to eliminate material migration
Drain and exhaust ports located in bottom of bowl
Stainless steel spin bowl
Drain and exhaust ports located in bottom of bowl
Lid Design
Closed- and open-lid designs available
Spin Environment
Optional nitrogen purge available for an inert spin environment
Reliability Features
Indirect drive system protects spin motor from contact with process chemicals and solvents
Vacuum and lid interlock with mechanical lock to prevent accidental process disruption (only 300X)
Dimensions
13.25″ W × 19″ D × 12″ H
(33.65 cm W × 48.26 cm D × 30.48 cm H)
Machine weight: 40 lb (18.14 kg)
Shipping weight: 100 lb (45.36 kg)
27.75″ W × 34.75″ D × 20.25″ H (70.5 cm W × 88.3 cm D × 51.5 cm H)
Machine weight: 115 lb (52.2 kg)
Shipping weight: 250 lb (113.4 kg)
UTILITIES
Voltage Ranges
100–125, 208–240 VAC 50/60 Hz
208–240 VAC 50/60 Hz
Power Requirements
655 watts
6.0 amps
1350 watts
7.0 amps
Drain Port
0.75″ OD
1″ OD
Exhaust Port
1″ OD
1.5″ OD
Vacuum
20–25 in Hg
20–25 in Hg
Exhaust
20–50 cfm at 0.2″ water column
20–50 cfm at 0.2″ water column
Nitrogen or CDA
(automated dispense)
70 psi
70 psi
Universal Spin Chuck Sets
The Brewer Science universal spin chuck base offers the unique ability to seamlessly switch among chuck sizes ranging from 1/8" to 4" in diameter.
Benefits
● Universal spin chuck base that fits interchangeable chuck sizes from 1/8” to 4”
● Reduced cost for the capability of handling multiple substrate dimensions
● Faster switching between substrates of different sizes
● No hardware required for installation
● Resistance to a wide variety of chemistries
● Compatibility with most generations of Brewer Science Cee© spin coaters (call to check
compatibility)
● For sets, a storage case for chuck sizes not in use
Brewer Science is offering 4 different options...
The Summit-Tech Company is an ISO:9001-2015 certified company. Copyright ©1996-2016 Summit-Tech Company® All rights reserved.