昇美達國際開發股份有限公司Oxidex Target

SPUTTERING TARGETS

昇美達

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Sputtering Targets

◉ Pure Metals

◉ Oxides

◉ Compounds/ Alloys

◉ Borides

◉ Carbides

◉ Fluorides

◉ Nitrides

◉ Selenides

◉ Silicides

◉ Sulphides

◉ Tellurides

◉ Target Bonding

Sputtering Targets - Oxides

Summit-Tech product program contains a wide range of oxide sputtering targets optimized for the special requirements of Sputtering Processes.

Our oxide sputtering targets offer a better yield, process stability and more design freedom for the optical coating engineer.

Many oxide sputtering targets require bonding. Please contact us if you should gave any questions or if your required sputter target material is not listed.

Name

Aluminum Oxide

Aluminum Zinc Oxide

Antimony Oxide

Antimony:Tin Dioxide

Barium Titanate

Bismuth Oxide

Cerium Oxide

Copper Oxide

Chromium Oxide

Dysprosium Oxide

Erbium Oxide

Formula

Al2O3

AZO

Sb2O3

ATO

BaTiO3

Bi2O3

CeO2

CuO

CrO3

Dy2O3

Er2O3

Purities

2N-4N

3N

3N5

2N5-4N

3N

2N-3N5

3N

2N5-3N5

Europium Oxide

Eu2O3

2N5-3N5

Gadolinium Oxide

Gd2O3

3N-4N5

Gallium Zinc Oxide

GZO

3N

Hafnium Oxide

HfO2

2N-4N

Holmium Oxide

Ho2O3

3N-4N5

Indium Oxide

In2O3

3N-4N

Indium Tin Oxide

ITO

3N-4N

Indium Zinc Oxid

IZO

3N-5N

Iron Oxide

Fe2O3

3N

Iron Oxide

Fe3O4

3N

Lanthanum Aluminate

LaAlO3

3N

Lead Titanate

PbTiO3

3N

Lead Zirconate

PbZrO3

4N

Lead Zirconate Titanate

PZT

3N

Lutetium Oxide

Lu2O3

2N-3N

Magnesium Oxide

MgO

4N

Molybdenum Oxide

MoO3

2N8-3N

Neodymium Oxide

Nd2O3

2N-3N

Nickel Oxide

NiO

3N

Niobium Pentoxide

Nb2O5

2N-5N

Praseodymium Oxide

Pr6O11

2N-3N

Samarium Oxide

Sm2O3

2N-3N

Scandium Oxide

Sc2O3

4N-5N

Silicon Dioxide

SiO2

2N-4N

Silicon Monoxide

SiO

3N-4N

Strontium Titanate

SrTiO3

3N

Tantalum Pentoxide

Ta2O5

3N5-4N

Terbium Oxide

Tb4O7

2N5-5N

Thulium Oxide

Tm2O3

2N5-5N

Titanium Oxide

TiO

3N

Titanium Oxide

TiO2

2N-4N

Titanium Oxide

Ti2O3

3N5

Titanium Oxide

Ti3O5

2N5-4N

Tungsten Oxide

WO3

3N

Vanadium Oxide

V2O5

3N

Yttrium Oxide

Y2O3

2N-5N

Ytterbium Oxide

Yb2O3

2N-4N

Zinc Oxide

ZnO

3N

Zirconium Oxide

ZrO2

3N-4N

Zirconium Titantium Oxide

ZrO2 + TiO2

4N

Zirconium Silicon Oxide

ZrO2 + SiO2

4N

Yttria Stabilized Zirconia

YSZ

4N