Si Wafer
2" (50.8mm) Silicon Wafer
SOI Wafer
Sapphire Wafer
Material Properties
Other Substrate
Carbon Content
0.5 – 1.0 ppmA
Custom tolerances per customer’s specification
Resistivity ranges- P, Boron- N, Phosphorous- N, Antimony- N, Arsenic
0.001 – 50 ohm cm
0.1 – 40 ohm cm
0.005 – 0.025 ohm cm
< 0.005 ohm cm
Mechanical Properties
Parameter
Prime
Monitor / Test A
Test
Diameter
2" ± 0.008"
2" ± 0.008"
2" ± 0.015"
Thickness
279 ± 20 µm (standard)
279 ± 25 µm (standard) 381 ± 25 µm 450 ± 25 µm
500 ± 25 µm 1000 ± 25 µm
279 ± 25 µm (standard)
TTV
< 5 µm
< 10 µm
< 15 µm
Bow
< 38 µm
< 38 µm
< 38 µm
Wrap
< 38 µm
< 38 µm
< 38 µm
Edge Rounding
SEMI-STD
Marking
Primary SEMI-Flat only, SEMI-STD Flats
Surface Quality
Parameter
Prime
Monitor / Test A
Test
Front Side Criteria
Surface condition
Chemical Mechanical Polished
Chemical Mechanical Polished
Chemical Mechanical Polished
Surface Roughness
< 2Å
< 2Å
< 2Å
Contamination,Particles @ >0.3 µm
< 2Å
< 2Å
< 2Å
Haze, Pits, Orange peel
None
None
None
Saw Marks, striations
None
None
None
Back Side Criteria
None
None
None
Caustic etched
Cracks, crowsfeet, saw marks,stains
Surface condition
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